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HOME : PRODUCT : M/W 
MODEL
Fl20606, Fl20634, AX3060
MAKER PSK, Novellus, LAM, ULVAC
PROCESS Etch
MAX.POWER 3000W
Pin 25Pin
Voltage 24V
Frequency 2440~2470MHz
 
MODEL Fl20162-1, Fl20162-2, Fl20162-3
MAKER PSK, Novellus, LAM, ULVAC
PROCESS Etch
MAX.POWER 3000W
Pin 25Pin
Voltage 200~208V
Frequency 2440~2470MHz

MAKER MODEL
AMAT SXRHC
PSK AX7690, Fl20160-1, Fl20160-2, Fl20160-3
LAM AX7690, Fl20160-1, Fl20160-2, Fl20160-3
Novellus AX7690, Fl20160-1, Fl20160-2, Fl20160-3
ULVAC Fl20160-1, Fl20160-2, Fl20160-3
Gasonic D13765

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