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HOME : PRODUCT : RPS 
MODEL
AX7651(-2), AX7657(-2) AX7650(AX7651-2), Fl20620(-1)
MAKER AMAT
PROCESS PE CVD
MAX.POWER
3000W 5000W
Pin 25Pin
Voltage 200~208V
Frequency 400kHz
 
MODEL AX7670-06&16,19 / AX7670-02&12&21 / AX7670-05&15
MAKER AMAT
PROCESS PE CVD
MAX.POWER 7000W
Pin 25Pin
Voltage 200~208V
Frequency 400kHz
 
Astron Part Number Customer Max Power Max Flow Rate
AX7665-01 AKT 25KW 30SLM
AX7657
AX7657-1
AX7657-2
AX7657-3 / AX7657-4
AX7657-5
AMAT
AMAT
MATTSON

GENUS
3KW 2SLM
Fl20620 / Fl20620-1
Fl80131
Fl80132
Fl80133
AX7685
AMK
AMK
AKT
NOVELLOUS
JEL
5KW
11KW
11KW
11KW
11KW
4SLM
6SLM
8SLM
6SLM
6SLM
AX7670
AX7670-02
AX7670-06 / AX7670-12
AX7670-16 / AX7670-19
AX7670-21
AX7670-30
AX7670-60
IPS
NOVELLOUS
AMK
AMK
NOVELLOUS
GENUS
AMK
7KW
7KW
7KW
7KW
7KW
3KW
7KW
4SLM
4SLM
4SLM
4SLM
4SLM
3SLM
4SLM
Fl80146
AX7635-02
AKT 13.5KW
14.6KW
15SLM
22SLM
AX7645PS-01
AX7645RH-01
NOVELLOUS 14KW
11.75KW
15SLM
15SLM
AX7690PSK-04 PSK 7KW 5SLM
AX7690LAM-23 LAM 7KW 5SLM

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        Tel : 031-372-3697 ㅣ Fax : 031-372-3698 ㅣ E-mail : tkkim@eco-tech.co.kr